D abstraction by H on Si( 1 1 1 ) surfaces

Surface Science

Volumn 536, Issue 1-3, 2003, Pages 191-205

  Khanom, F ^a   Aoki, A ^a   Rahman, F ^a   Namiki, A ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Atom solid interactions; Hydrogen atom; Hydrogen molecule; Silicon; Thermal desorption

Indexed keywords

ACTIVATION ENERGY; CRYSTAL ORIENTATION; DEUTERIUM; HYDROGEN; TEMPERATURE PROGRAMMED DESORPTION;

ATOM-SOLID INTERACTIONS;

SILICON;

EID: 0037681874     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(03)00591-0     Document Type: Article

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