Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection

Applied Optics

Volumn 38, Issue 9, 1999, Pages 1746-1751

  Higurashi, Eiji ^a   Sawada, Renshi ^a   Ito, Takahiro ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345766840     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.001746     Document Type: Article

References (11)

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