Structural analysis of anatase polycrystalline films using time-dependent deformation behavior

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 4 A, 2003, Pages 1738-1743

  Sugata, Hironori ^a   Ohshio, Shigeo ^a   Saitoh, Hidetoshi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Anatase; Creep; CVD; Film; Grain boundary; Hardness; Nanoindentation; Polycrystal

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; CREEP; DEFORMATION; GRAIN BOUNDARIES; MICROSTRUCTURE; MORPHOLOGY; STRAIN RATE; SUBSTRATES; SURFACE STRUCTURE; THERMOCOUPLES; THIN FILMS;

NANOINDENTATION TECHNIQUE; NANOINDENTER; POLYCRYSTALLINE FILM; POWER-LAW MODEL; TIME-DEPENDENT DEFORMATION;

POLYCRYSTALLINE MATERIALS;

EID: 0037594077     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1738     Document Type: Article

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