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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 10, 2000, Pages 6008-6015

Nano-indentation for structural analysis of hydrogen- and nitrogen-containing carbon films

(3) Tanaka, Daisuke a Ohshio, Shigeo a Saitoh, Hidetoshi a

a NAGAOKA UNIVERSITY OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON NITRIDE; CREEP; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; HYDROGENATION; INDENTATION; NITROGEN; RAMAN SPECTROSCOPY; STRAIN RATE; STRUCTURE (COMPOSITION); X RAY PHOTOELECTRON SPECTROSCOPY;

CLUSTER FLOW; NANO INDENTATION;

DIAMOND LIKE CARBON FILMS;

EID: 0034291266 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.6008 Document Type: Article

Times cited : (17)

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