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Volumn 500, Issue 1-2, 2001, Pages 178-184

Ellipsometric and microwave reflectivity studies of current oscillations during anodic dissolution of p-Si in fluoride solutions

(4) Bohm S a Peter, L M a Schlichthorl G a Greef, R b

a University of Bath Claverton Down (United Kingdom)

b UNIVERSITY OF SOUTHAMPTON (United Kingdom)

Author keywords

Ellipsometry; Etching; Fluoride; Microwave; Oscillations; Silicon

Indexed keywords

DISSOLUTION; ELECTRIC CURRENTS; ELECTRIC IMPEDANCE; ELECTRIC POTENTIAL; ELECTROMAGNETIC WAVE REFLECTION; ELLIPSOMETRY; ETCHING; FLUORINE COMPOUNDS; MASS TRANSFER; MICROWAVES; OSCILLATIONS; SINGLE CRYSTALS;

AMMONIUM FLUORIDE; ANODIC DISSOLUTION; POTENTIAL MODULATED MICROWAVE REFLECTIVITY;

SILICON;

EID: 0037580914 PISSN: 00220728 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0728(00)00397-1 Document Type: Article

Times cited : (16)

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