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Volumn 171, Issue 1-3, 2003, Pages 51-58

Microstructure and optical properties of MgO films synthesized by closed-field unbalanced magnetron sputtering with additional electron emission

(2) Nam, Kyung H a Han, Jeon G a

a Sungkyunkwan University (South Korea)

Author keywords

CFUBM with additional electron emission; Deposition rate and microstructure; MgO films

Indexed keywords

COATINGS; CRYSTAL DEFECTS; ELECTRON EMISSION; FILMS; IONIZATION; MAGNETIC FIELDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPACITY; PLASMA DENSITY; REFRACTIVE INDEX;

CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING (CFUBM);

MAGNESIA;

FILM; MAGNESIUM OXIDE; MICROSTRUCTURE; SPUTTERING;

EID: 0037566098 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00235-4 Document Type: Article

Times cited : (16)

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