Electron-assisted deposition of cubic boron nitride by r.f. magnetron sputtering

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1402-1405

  Tzeng, Y ^a   Zhu, H ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Cubic boron nitride; Electron; Ion; r.f. magnetron sputtering

Indexed keywords

CURRENT DENSITY; ELECTRODEPOSITION; ELECTRON IRRADIATION; ELECTRONIC DENSITY OF STATES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; SEMICONDUCTING SILICON; SYNTHESIS (CHEMICAL);

ABSORPTION BAND; ELECTRON BOMBARDMENT;

CUBIC BORON NITRIDE;

EID: 0032594401     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00056-4     Document Type: Article

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