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Volumn 15, Issue 4, 1997, Pages 2007-2012
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Reactive sputtering of titanium diboride and titanium disilicide
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0031475397
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.580671 Document Type: Article |
Times cited : (6)
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References (25)
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