Reactive sputtering of titanium diboride and titanium disilicide

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2007-2012

  Maya, L ^a   Vallet, C E ^a   Fiedor, J N ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b East Tennessee Technology Park   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031475397     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580671     Document Type: Article

References (25)

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