Combined x-ray photoelectron/Auger electron spectroscopy/glancing angle x-ray diffraction/extended x-ray absorption fine structure investigation of TiBxNy coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 2, 1997, Pages 284-291

  Baker, M A ^a   Mollart, T P ^a   Gibson, P N ^a   Gissler, W ^a  

^a JOINT RESEARCH CENTRE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031511162     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580526     Document Type: Article

References (20)

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7. W. Gissler, Surf. Coat. Technol. 68/69, 556 (1994).
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10. "SERC Daresbury Laboratory EXCURV92 program," edited by N. Binsted, J. W. Campbell, S. J. Gurman, and P. C. Stephenson (1991) (unpublished).
11. I. leR. Strydom and S. Hofmann, J. Electron Spectrosc. Relat. Phenom. 56, 85 (1991).
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13. R. Trehan, Y. Lifshitz, and J. W. Rabalais, J. Vac. Sci. Technol. A 8, 4026 (1990).
14. The origin of the 9 eV loss peak for h-BN as an interband transition is rejected by Trehan et al. (Ref. 13) on the grounds that the energy is higher than the theoretical predicted and optically measured π-π* transition energy of 6.2-6.5 eV, listed by Zunger (Ref. 18). In the same article by Zunger, theoretical and optically measured π-π* transition energies for graphite are given generally to be 4.5-4.6 eV. However, the π-π* loss peak for graphite in the reflection EELS and XPS spectra is found to occur at a higher energy of 5.9 eV (Ref. 19). The transmission EELS spectrum for h-BN shows a π-π* transition to occur at 9 eV (Ref. 20). Thus, the loss peak in the XPS spectrum at 9 eV corresponds to the same π-π* transition. The possibility of an excitation of an electron from the maxima of valence band in B to the excitonic level in the band gap, would also lead to an transition energy of 9 eV (Refs. 15 and 16). However, the presence of a π-π* in the low energy region of transmission EELS spectrum for h-BN (Ref. 20) and the absence of this loss peak for c-BN (which also exhibits an excitonic level), indicate that a π-π* transition is the origin of the XPS 9 eV loss peak.
15. G. Hanke, M. Kramer, and K. Müller, Mater. Sci. Forum 54/55, 207 (1990).
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17. T. P. Mollart, P. N. Gibson, and M. A. Baker, J. Phys. D: Appl. Phys. (submitted).
18. A. Zunger, J. Phys. C 7, 96 (1974).
19. This laboratory (unpublished results).
20. D. R. McKenzie, W. G. Sainty, and D. Green, Mater. Sci. Forum 54/55, 193 (1990).