Study of thermal stability of some hard nitride coatings deposited by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 200-205

  Heau C ^a   Fillit, R Y ^b   Vaux, F ^a   Pascaretti, F ^a  

^a Rue Benoît Fourneyron 42166 ^*  (France)

^b ECOLE DES MINES DE SAINT ETIENNE   (France)

Author keywords

Chromium nitride; Thermal stability; Titanium boronitride; Titanium nitride

Indexed keywords

COATING; SPUTTERING; TEMPERATURE EFFECT; TITANIUM NITRIDE;

EID: 0038013421     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00456-9     Document Type: Conference Paper

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