|
Volumn 38, Issue 4, 2003, Pages 675-680
|
A triple axis mode X-ray diffraction measurement on elastic strain distribution of lightly Cr-doped SI-GaAs for laser windows
|
Author keywords
Optical materials; X ray diffraction
|
Indexed keywords
DOPING (ADDITIVES);
LATTICE CONSTANTS;
RAPID THERMAL ANNEALING;
SEMICONDUCTING GALLIUM ARSENIDE;
SILICON WAFERS;
STRAIN;
X RAY DIFFRACTION;
SPATIAL VARIATION;
LASER WINDOWS;
|
EID: 0037463934
PISSN: 00255408
EISSN: None
Source Type: Journal
DOI: 10.1016/S0025-5408(02)01065-6 Document Type: Article |
Times cited : (4)
|
References (21)
|