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Volumn 657, Issue , 2001, Pages
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Micropatterning of ceramics on substrates towards gas sensing applications
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL SENSORS;
CHEMICAL VAPOR DEPOSITION;
COLLOIDS;
MICROELECTROMECHANICAL DEVICES;
OXIDES;
PHOTOLITHOGRAPHY;
PHYSICAL VAPOR DEPOSITION;
POWDERS;
SEMICONDUCTOR DOPING;
SUBSTRATES;
THICK FILMS;
THIN FILM DEVICES;
TIN COMPOUNDS;
CERAMIC POWDERS;
LOGICAL CHIP;
THICK FILM STRUCTURES;
CERAMIC MATERIALS;
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EID: 17344375645
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (15)
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