Manufacturing silicon carbide microrotors by reactive hot isostatic pressing within micromachined silicon molds

Journal of the American Ceramic Society

Volumn 85, Issue 1, 2002, Pages 261-263

  Li, Jing Feng ^a   Sugimoto, Shinya ^a   Tanaka, Shuji ^a   Esashi, Masayoshi ^a   Watanabe, Ryuzo ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ETCHING; FABRICATION; HOT ISOSTATIC PRESSING; MICROMACHINING; MIXTURES; MOLDS; POWDERS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON CARBIDE; SINTERING; X RAY DIFFRACTION ANALYSIS;

REACTIVE HOT ISOSTATIC PRESSING;

CERAMIC MATERIALS;

EID: 0036343546     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2002.tb00077.x     Document Type: Article

References (9)

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