A microscope for imaging, spectroscopy, and lithography at the nanometer scale: Combination of a two-photon laser scanning microscope and an atomic force microscope

Review of Scientific Instruments

Volumn 74, Issue 3 I, 2003, Pages 1211-1216

  Schrey, F F ^a,b   Chaban, E E ^a   Matthews, M J ^a   Hsu, J W P ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARGE COUPLED DEVICES; CRYSTAL STRUCTURE; GALLIUM NITRIDE; LIGHT SCATTERING; MOLECULAR BEAM EPITAXY; NEAR FIELD SCANNING OPTICAL MICROSCOPY; NEODYMIUM LASERS; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; PHOTOLUMINESCENCE; PHOTOMULTIPLIERS; PULSED LASER APPLICATIONS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING POLYMERS; TRANSMISSION ELECTRON MICROSCOPY;

TOPOGRAPHIC IMAGES;

NANOTECHNOLOGY;

EID: 0037348288     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1535234     Document Type: Article

References (22)

1. W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).
2. R. Wolleschensky, T. Feurer, R. Sauerbrey, and U. Simon, Appl. Phys. B: Lasers Opt. 67, 87 (1998).
3. J. C. Diels and W. Rudolph, Ultrashort Laser Pulse Phenomena (Academic, New York, 1997).
4. J. W. P. Hsu, M. J. Manfra, D. V. Lang, K. W. Balwin, L. N. Pfeiffer, and R. J. Molnar, J. Electron. Mater. 30, 110 (2001).
5. H. E. Pudavar, M. P. Joshi, and P. N. Prasad, Appl. Phys. Lett. 74, 1338 (1999).
6. H.-B. Sun, T. Tanaka, and S. Kawata, Appl. Phys. Lett. 80, 3673 (2002).
7. M. P. Joshi, H. E. Pudavar, J. Swiatkewicz, and P. N. Prasad, Appl. Phys. Lett. 74, 170 (1999).
8. B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, Nature (London) 398, 51 (1999).
9. H.-B. Sun, T. Tanaka, K. Takada, and S. Kawata, Appl. Phys. Lett. 79, 1411 (2001).
10. M. Horton, G. Charras, C. Ballestrem, and P. Lehenkari, Single Mol. 1, 135 (2000).
11. C. A. J. Putman, A. M. van Leeuwen, B. G. de Grooth, K. Radosevic, K. O. van der Werf, N.F. Hulst, and J. Greve, Bioimaging 1, 63 (1993).
12. Scan range can be as large as 140 μm×140 μm before it becomes unstable due to vibration.
13. CCD camera can be mounted on the eyepiece for this purpose to avoid direct viewing of any laser light.
14. M. Born and E. Wolf, Principles of Optics (Cambridge University Press, London, 1999).
15. J. Squier and M. Muller, Rev. Sci. Instrum. 72, 2855 (2001).
16. P. Fini, L. Zhao, B. Moran, M. Hansen, H. Marchand, J. P. Ibbetson, S. P. DenBaars, U. K. Mishra, and J. S. Speck, Appl. Phys. Lett. 75, 1706 (1999).
17. H. Marchand, X. H. Wu, J. P. Ibbetson, P. T. Fini, P. Kozodoy, S. Keller, J. S. Speck, S. P. DenBaars, and U. K. Mishra, Appl. Phys. Lett. 73, 747 (1998).
18. S. J. Rosner, G. Girolami, H. Marchand, P. T. Fini, J. P. Ibbetson, L. Zhao, S. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 74, 2035 (1999).
19. J. W. P. Hsu, M. J. Matthews, D. Abusch-Magder, R. N. Kleiman, D. V. Lang, S. Richter, S. L. Gu, and T. F. Kuech, Appl. Phys. Lett. 79, 761 (2001).
20. Use as received from Microchem Corp., Newton, MA 02464.
21. C. Shafai, D. J. Thomson, M. Simard-Normandin, G. Mattiussi, and P. J. Scanlon, Appl. Phys. Lett. 64, 342 (1994); S. Richter, M. Geva, J. P. Garno, and R. N. Kleiman, Ibid. 77, 456 (2000).
22. Shafai, D. J. Thomson, M. Simard-Normandin, G. Mattiussi, and P. J. Scanlon, Appl. Phys. Lett. 64, 342 (1994); S. Richter, M. Geva, J. P. Garno, and R. N. Kleiman, Ibid. 77, 456 (2000).