Investigation of the nano-structure and optical features of nc-Si films grown by RF magnetron sputter techniques

Journal of the Korean Physical Society

Volumn 42, Issue SPEC., 2003, Pages

  Han, K H ^a   Cho, N H ^a  

^a Inha University   (South Korea)

Author keywords

Nano crystallite; Photoluminescence; Si; Thin film

Indexed keywords

EID: 0037306660     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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