Challenging issues in microelectromechanical systems

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 261-264

  Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MICROMACHINING; MINIATURE INSTRUMENTS; SEMICONDUCTOR DEVICE MANUFACTURE;

SURFACE SCIENCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0032294205     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)