Generalized MEMS lot monitoring using fully-integrated material and structure mechanical analysis

Sensors and Actuators, A: Physical

Volumn 101, Issue 1-2, 2002, Pages 220-230

  Minotti, Patrice ^a   Bourbon, G ^a   Joseph, E ^a   Le Moal, P ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Bending fracture; Contact interactions; Electrostatic actuators; Mechanical characterization; MEMS; Microactuator loading characteristics; Polysilicon fracture strength; Tensile fracture

Indexed keywords

BENDING STRENGTH; CHEMICAL VAPOR DEPOSITION; CRACK PROPAGATION; ELECTROSTATIC ACTUATORS; FRACTURE TOUGHNESS; POLYSILICON; TENSILE TESTING;

BENDING FRACTURE; CONTACT INTERACTIONS; POLYSILICON FRACTURE STRENGTH; TENSILE FRACTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0037201862     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00198-X     Document Type: Article

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