Small area in-situ MEMS test structure to measure fracture strength by electrostatic probing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3875, Issue , 1999, Pages 97-103

  de Boer, Maarten P ^a   Jensen, Brian D ^a   Bitsie, Fernando ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLE FRACTURE; ELECTROSTATIC DEVICES; FATIGUE OF MATERIALS; FRACTURE TESTING; FRACTURE TOUGHNESS; MATHEMATICAL MODELS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; THREE DIMENSIONAL;

ELECTROSTATIC PROBING; POLYCRYSTALLINE SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0033315328     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (28)