Electron collision data for plasma-processing gases

Advances in Atomic, Molecular and Optical Physics

Volumn 44, Issue C, 2001, Pages 59-98

  Christophorou, Loucas G ^a   Olthoff, James K ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77956665916     PISSN: 1049250X     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1049-250X(01)80029-X     Document Type: Article

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