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Volumn 91-92, Issue , 2002, Pages 358-366
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Electrical properties of SiC: Characterisation of bulk crystals and epilayers
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Author keywords
Doping effects; Electrical measurements; Electron paramagnetic resonance; Silicon carbide
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Indexed keywords
CAPACITANCE;
CRYSTAL IMPURITIES;
CRYSTAL LATTICES;
CRYSTALS;
ELECTRIC POTENTIAL;
PARAMAGNETIC RESONANCE;
SEMICONDUCTOR DOPING;
EPITAXIAL LAYERS;
SILICON CARBIDE;
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EID: 0037197449
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(01)01071-6 Document Type: Conference Paper |
Times cited : (24)
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References (25)
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