SiC dopant incorporation control using site-competition CVD

Physica Status Solidi (B) Basic Research

Volumn 202, Issue 1, 1997, Pages 305-320

  Larkin, D J ^a  

^a NASA GLENN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031536334     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3951(199707)202:1<305::AID-PSSB305>3.0.CO;2-9     Document Type: Article

References (32)

1. Cree Research, Inc., Data Sheet 4/91.
2. D. J. LARKIN, P. G. NEUDECK, J. A. POWELL, and L. G. MATUS, Inst. Phys. Conf. Ser. No. 137, 51 (1994).
3. D. J. LARKIN, P. G. NEUDECK, J. A. POWELL, and L. G. MATUS, Appl. Phys. Lett. 65, 1659 (1994).
4. D. J. LARKIN, S. G. SRIDHARA, R. P. DEVATY, and W. J. CHOYKE. J. Electronic Mater. 24. 289 (1995).
5. D. J. LARKIN, Inst. Phys. Conf. Ser. No. 142, 23 (1995).
6. S. KARMANN, L. D. CIOCCIO, B. BLANCHARD, T. OUISSE, D. MUYARD, and C. JAUSSAUD, Mater. Sci. Engng. B 29, 134 (1995).
7. R. RUPP, P. LANIG, R. SCHORNER, K.-O. DOHNKE, J. VOLKL, and D. STEPHANI, Inst. Phys. Conf. Ser. No. 142, 185 (1995).
8. M. A. TISCHLER, private communication.
9. A. A. BURK, JR., et al., Inst. Phys. Conf. Ser. No. 137, 29 (1994).
10. P. G. NEUDECK, D. J. LARKIN, J. A. POWELL, L. G. MATUS, and C. S. SALUPO, Appl. Phys. Lett. 64, 1386 (1994).
11. J. B. PETIT, P. G. NEUDECK, C. S. SALUPO, D. J. LARKIN, and J. A. POWELL, Inst. Phys. Conf. Ser. No. 137, 679 (1994).
12. P. G. NEUDECK, J. B. PETIT, and C. S. SALUPO, 2nd Internat. High Temperature Electronic Conference, Vol. 1, Eds. D. B. KING and F. V. THOMES, Sandia National Laboratories, Charlotte (NC), 1994 (p. X).
13. Cree Research, Inc., Durham, NC, 27713.
14. J. A. POWELL, L. G. MATUS, and M. A. KUCZMARSKI, J. Electrochem. Soc. 134, 1558 (1987).
15. J. A. POWELL, D. J. LARKIN, L. G. MATUS, W. J. CHOYKE, J. L. BRADSHAW, L. HENDERSON, M. YOGANATHAN, J. YANG, and P. PIROUZ, Appl. Phys. Lett. 56, 1442 (1990).
16. Charles Evans & Associates, Redwood City, CA. 94063.
17. M. YOGANATHAN, W. J. CHOYKE, R. P. DEVATY, and P. G. NEUDECK, J. Appl. Phys. 80, 1763 (1996).
18. W. J. CHOYKE, in: The Physics and Chemistry of Carbides, Nitrides, and Borides, Vol. 185, Kluwer Academic Publ., Dordrecht 1990 (p. 863).
19. R. F. DAVIS and J. T. GLASS, in: Advances in Solid-State Chemistry, Vol. 2, Ed. C. R. A. CATLOW, JAI Press, Ltd., London 1991 (p. 1).
20. T. TROFFER, C. PEPPERMULLER, G. PENSL, K. ROTTNER, and A. SCHONER, J. Appl. Phys. 80, 3739 (1996).
21. C. RAYNAUD, F. DUCROQUET, G. GUILLOT, L. M. PORTER, and R. F. DAVIS, J. Appl. Phys. 76, 1956 (1994).
22. K. F. PURCELL and J. C. KOTZ, Inorganic Chemistry, W. B. Saunders Co., Philadelphia (PA) 1977.
23. H. H. WOODBURY and G. W. LUDWIG, Phys. Rev. 124, 1083 (1961).
24. A. I. VEINGER, G. A. VODAKOV, Y. I. KOZLOV, G. A. LOMAKINA, E. I. MOKHOV, V. G. ODING, and V. I. SOKOLOV, Soviet Phys. - J. Tech. Phys. Lett. 6, 566 (1980).
25. A. G. ZUBATOV, I. M. ZARITSKII, S. N. LUKIN, E. N. MOKHOV, and V. G. STEPANOV, Soviet. Phys. - Solid State 27, 197 (1985).
26. J. REINKE, S. GREULICH-WEBER, J.-M. SPAETH, E. N. KALABUKHOVA, S. N. LUKIN, and E. N. MOKHOV, Inst. Phys. Conf. Ser. No. 137, 211 (1994).
27. L. PATRICK, and W. J. CHOYKE, Phys. Rev. B 9, 1997 (1974).
28. W. J. CHOYKE, P. J. DEAN, and L. PATRICK, Phys. Rev. B 10, 2554 (1974).
29. L. L. CLEMEN, W. J. CHOYKE, A. A. BURK, JR., D. J. LARKIN, and J. A. POWELL, Inst. Phys. Conf. Ser. No. 137, 227 (1993).
30. C. PEPPERMULLER, R. HELBIG, K. ROTTNER, and A. SCHONER, Appl. Phys. Lett. 70, 1014 (1997).
31. S. A. STOCKMAN and G. E. STILLMAN, Mater. Sci. Forum 148/149, 501 (1994).
32. J. REINKE, R. MULLER, M. FEEGE, S. GREULICH-WEBER, and J.-M. SPAETH, Mater. Sci. Forum 143/147, 63 (1994).