Nitrogen passivation of deposited oxides on n 4H-SiC

Applied Physics Letters

Volumn 81, Issue 22, 2002, Pages 4266-4268

  Chung, G Y ^a   Williams, J R ^b   Isaacs Smith, T ^b   Ren, F ^c   McDonald, K ^d   Feldman, L C ^d  

^a Sterling Semiconductor   (United States)

^b AUBURN UNIVERSITY   (United States)

^c University of Florida   (United States)

^d VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; PASSIVATION; SILICON CARBIDE; SURFACE CHEMISTRY;

LOW TEMPERATURE OXIDES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0037175891     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1525058     Document Type: Article

References (20)

1. V.V. Afanasev, M. Bassler, G. Pensl, and M. Schulz, Phys. Stares Solidi A 162, 321 (1997).
2. R. Schorner, P. Friedrichs, D. Peters, and D. Stephani, IEEE Electron Device Lett. 20, 241 (1999).
3. G. Chung, C.C. Tin, J.H. Won, and J.R. Williams, Mater. Sci. Forum 338, 1097 (1999).
4. M.K. Das, B.S. Um, and J.A. Cooper, Jr., Mater. Sci. Forum 338, 1069 (2000).
5. N.S. Saks, S.S. Mani, and A.K. Agarwal, Appl. Phys. Lett. 76, 2250 (2000).
6. G. Chung, C.C. Tin, J.R. Williams, K. McDonald, R.A. Weller, M. Di Ventra, S.T. Pantelides, and L.C. Feldman, Appl. Phys. Lett. 76, 1713 (2000).
7. G. Chung, C.C. Tin, J.R. Williams, K. McDonald, R.A. Weller, M. Di Ventra, S.T. Pantelides, and L.C. Feldman, Appl. Phys. Lett. 77, 3601 (2000).
8. H. Li, S. Dimitrijev, H.B. Harrison, and D. Sweatman, Appl. Phys. Lett. 70, 2028 (1997).
9. P. Jamet, S. Dimitrijev, and P. Tanner, Mater. Sci. Forum 389, 973 (2002).
10. L.A. Lipkin, M.K. Das, and J.W. Palmour, Mater. Sci. Forum 389, 985 (2002).
11. G. Chung, C.C. Tin, J.R. Williams, K. McDonald, R.A. Weller, M. Di Ventra, S.T. Pantelides, and L.C. Feldman, Mater. Res. Soc. Symp. Proc. 662, T8.7.1 (2000).
12. Fukuda et al., Appl. Phys. Lett. 76, 1585 (2000).
13. H. Yano, T. Hirao, T. Kimoto, and H. Matsunami, Appl. Phys. Lett. 78, 374 (2001).
14. K. Fukuda, J. Sensaki, M. Kushibe, K. Kojima, R. Kosugi, S. Susuki, S. Harade, T. Susuki, T. Tanaka, and K. Arai, Mater. Sci. Forum 389, 1057 (2001).
15. G. Chung, C.C. Tin, J.R. Williams, K. McDonald, R.K. Chanana, R.A. Weller, S.T. Pantelides, L.C. Feldman, O.W. Holland, M.K. Das, and J.W. Palmour, IEEE Electron Device Lett. 22, 176 (2001).
16. C.-Y. Lu, J.A. Cooper, G. Chung, J.R. Williams, K. McDonald, and L.C. Feldman, Mater. Sci. Forum 389, 977 (2002).
17. G.Y. Chung, J.R. Williams, C.C. Tin, K. McDonald, D. Farmer, R.K. Chanana, S.T. Pantelides, O.W. Holland, and L.C. Feldman, Appl. Surf. Sci. 184, 399 (2001).
18. K.C. Chang, Q. Wahab, and L.M. Porter, Mater. Res. Soc. Symp. Proc. 640, H5.45.1 (2001).
19. K. McDonald, Ph.D. dissertation, Vanderbilt University, 2001.
20. R.K. Chanana, K. McDonald, G. Chung, C.C. Tin, S.T. Pantelides, J.R. Williams, R.A. Weller, and L.C. Feldman (unpublished).