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Volumn 88, Issue 8, 2002, Pages 085501/1-085501/4
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Growth of precursors in silicon using pseudopotential calculations
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ATOMS;
BINDING ENERGY;
CALCULATIONS;
IRRADIATION;
MATHEMATICAL MODELS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR GROWTH;
BOND CENTERED INTERSTITIAL;
CHAINLIKE DEFECTS;
ION IRRADIATION;
PSEUDOPOTENTIAL CALCULATION;
DEFECTS;
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EID: 0037170201
PISSN: 00319007
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevLett.88.085501 Document Type: Article |
Times cited : (20)
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References (28)
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