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Volumn 23, Issue 2, 2002, Pages 225-228

Chemical vapor deposition of Ga2O3 thin films on Si substrates

Author keywords

Gallium isopropoxide; Gallium oxide; Metal organic chemical vapor deposition; Single precursor

Indexed keywords

GALLIUM; SILICON;

EID: 0037138940     PISSN: 02532964     EISSN: None     Source Type: Journal    
DOI: 10.5012/bkcs.2002.23.2.225     Document Type: Article
Times cited : (47)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.