Thin-film gas sensors based on high-temperature-operated metal oxides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1866-1872

  Fleischer, M ^a   Meixner, H ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENTS; DETECTION OF EXPLOSIVES; GAS DETECTION; GAS SENSORS; GRAIN-BOUNDARY BARRIERS; HIGH TEMPERATURE; HYDROGEN LEAKAGE; INFLUENCE OF HUMIDITY; METAL OXIDE FILM; METAL OXIDES; SENSING MECHANISM; TEMPERATURE DEPENDENCE; THIN-FILM GAS SENSORS; TOXIC GAS;

CHEMICAL SENSORS; EXHAUST GASES; EXPLOSIVES DETECTION; GAS DETECTORS; OXIDE FILMS; OXYGEN; SEMICONDUCTING FILMS;

GAS PERMEABLE MEMBRANES;

EID: 42649127863     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581906     Document Type: Conference Paper

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