Scanning electric field sensing for semiconductor dopant profiling

Applied Surface Science

Volumn 195, Issue 1-4, 2002, Pages 146-154

  Crosser, M S ^a   Tessmer, S H ^a   Ghosh, Ruby N ^a  

^a MICHIGAN STATE UNIVERSITY   (United States)

Author keywords

Electric field imaging; Scanning probe microscopy; Semiconductor dopant density

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; ELECTRIC FIELD MEASUREMENT; ELECTRONIC PROPERTIES; ELECTROSTATICS; IMAGING TECHNIQUES; SEMICONDUCTOR DOPING; SUBSTRATES;

SCANNING PROBE MICROSCOPY (SPM);

SURFACE CHEMISTRY;

EID: 0037099204     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00538-X     Document Type: Article

References (17)

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