Scanning capacitance microscopy measurement of two-dimensional dopant profiles across junctions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 339-343

  Kopanski, J J ^a   Marchiando, J F ^a   Berning, D W ^a   Alvis, R ^b   Smith, H E ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b ADVANCED MICRO DEVICES   (United States)

^c HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11644316840     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589807     Document Type: Article

References (14)

1. C. C. Williams, W. P. Hough, and S. A. Rishton, Appl. Phys. Lett. 55, 203 (1989).
2. Y. Huang and C. C. Williams, J. Vac. Sci. Technol. B 12, 369 (1994).
3. J. J. Kopanski, J. F. Marchiando, and J. R. Lowney, J. Vac. Sci. Technol. B 14, 242 (1996).
4. P. DeWolf, T. Clarysse, W. Vandervorst, J. Snauwaert, and L. Hellemans, J. Vac. Sci. Technol. B 14, 380 (1996).
5. The National Technology Roadmap for Semiconductors is published by the Semiconductor Industry Association, 4300 Stevens Creek Boulevard, Suite 271, San Jose, CA 95129.
6. A. Diebold, M. Kump, J. J. Kopanski, and D. G. Seiler, in Diagnostic Techniques for Semiconductor Materials and Devices 1994, edited by D. K. Schroder, J. L. Benton, and P. Rai-Choudhury (The Electrochemical Society, Pennington, NJ, 1994).
7. J. J. Kopanski and J. F. Marchiando, in Workshop Summary Report: Industrial Applications of Scanned Probe Microscopy, edited by J. A. Dagata NISTIR, National Institute of Standards and Technology Internal Report (May, 1996).
8. J, J. Kopanski, J. F. Marchiando, and J. R. Lowney, Mater. Sci. Eng. B 44, 46 (1997).
9. J. F. Marchiando, Int. J. Numer. Methods Eng. 39, 1029 (1996); J. Res. Inst. Stand. Technol. 100, 661 (1995).
10. J. F. Marchiando, Int. J. Numer. Methods Eng. 39, 1029 (1996); J. Res. Inst. Stand. Technol. 100, 661 (1995).
11. J. F. Marchiando, J. R. Lowney, and J. J. Kopanski, Scanning Microsc. (to be published).
12. A. S. Grove, Physics and Technology of Semiconductor Devices (Wiley, New York, 1967).
13. A. S. Grove, B. E. Deal, E. H. Snow, and C. T. Sah, Solid-State Electron. 8, 145 (1965).
14. J. F. Marchiando and J. J. Kopanski, J. Vac. Sci. Technol. B, these proceedings.