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CIRP Annals - Manufacturing Technology

Volumn 42, Issue 2, 1993, Pages 753-767

Scales vs. Laser Interferometers Performance and Comparison of Two Measuring Systems

(3) Kunzmann, H a Pfeifer, T b Flugge J a

a PHYSIKALISCH TECHNISCHE BUNDESANSTALT (Germany)

b RWTH AACHEN UNIVERSITY (Germany)

Author keywords

Accuracy; Displacement measurements; Gratings; Laser interferometers

Indexed keywords

EVALUATION; HELIUM NEON LASERS; INSTRUMENT SCALES; INTERFEROMETERS; LASER APPLICATIONS; MACHINE TOOLS; POSITION CONTROL; RELIABILITY;

LASER INTERFEROMETERS; LINEAR DISPLACEMENT MEASURING SYSTEMS (LDMS); SERVO POSITIONING MACHINE TOOLS;

MECHANICAL VARIABLES MEASUREMENT;

EID: 0027873345 PISSN: 00078506 EISSN: 17260604 Source Type: Journal
DOI: 10.1016/S0007-8506(07)62538-4 Document Type: Article

Times cited : (108)

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