Automatic gauge block measurement by phase stepping interferometry with three laser wavelengths

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4401, Issue , 2001, Pages 1-10

  Bönsch, Gerhard ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Gauge blocks; Measurement automation; Phase stepping interferometry; Three wavelengths interferometry

Indexed keywords

AUTOMATION; CALIBRATION; HEAT EXCHANGERS; INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; LIGHT INTERFERENCE; SPATIAL VARIABLES MEASUREMENT; STANDARDS; THERMAL INSULATION; THERMODYNAMIC STABILITY; THERMOSTATS;

AUTOMATIC MEASUREMENT; PHASE STEPPING INTERFEROMETRY; TWYMAN-GREEN INTERFEROMETER;

GAGE BLOCKS;

EID: 0035761733     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445608     Document Type: Conference Paper

References (19)

1. W. Kösters, "Prüfung von Johannson Endmaßen mit Lichtinterferenz," Feinmechanik und Präzision 1, pp 2-5, pp 39-41, 1922
2. W. Kösters, "Ein neuer Interferenzkomparator für unmittelbaren Wellenlängenanschluß," Feinmechanik und Präzision 7, pp. 55-59, 1926
3. O.J. Raymond, "Limiting Fringe Pointing Precision in a Scanning Two-Beam Interferometer," Appl. Opt. 9, pp 1140-1145, 1970
4. G. Bönsch, "Fotoelektrische Streifenbruchteilbestimmung im Kösters'schen Interferenzkomparator", Feinwerktechnik & Meßtechnik 84, pp 350-353, 1976
5. E. Ikonen and K. Riski, Gauge-block Interferometer Based on One Stabilized Laser and White Light Source," Metrologia 39, pp 95-104, 1993
6. D. J. Pugh and K. Jackson, "Automatic gauge block measurement using multiple wavelength interferometry," Proc. SPIE 656, pp 244-259, 1986
7. A. Lewis, "Measurement of length, surface form and thermal expansion coefficient of length bars up to 1,5 m using multiple wavelength phase-stepping interferometry," Meas. Sci. Technol. 5, pp 694-703, 1994
8. I. Malinovsky, A. Titov, C.A. Massone, "Fringe-image processing gauge block comparator of high precision," In Proc. SPIE 3477, pp 92-100, (Intern. Conf. on Optical Metrology of Gauge Blocks, San Diego, Calif., July 1998)
9. L.A. Salbut, M. Kujawinska, "Modification of the Köster interferometer for automatization of gauge block measurements," In Proc. SPIE 3477, pp 116-126, (Intern. Conf. on Optical Metrology of Gauge Blocks, San Diego, Calif., July 1998)
10. K. Creath, "Temporal phase measuring methods" In "Interferogram analysis: digital fringe pattern measuring techniques" D. W. Robinson and G. T. Reid, eds; 1993; ISBN 0-7503-0197-X
11. P. Carré, "Installation et utilisation du comparateur photoélectrique et interférentiel du Bureau International des Poids et Mesures," Metrologia 2, pp 13-23, 1966
12. Torsten Gruhn, to be published
13. G. Bönsch, E. Potulski, "Measurement of the refractive index of air and comparison with modified Edlén's formulae," Metrologia 35, pp 133-139, 1998
14. International Standard ISO-3650: Geometrical Product Specifications - Length standards - Gauge blocks, Geneva, International Organisation for Standardization, 1998, 1-15
15. EA-Guideline (European co-operation for Accreditation) EA-10/02, "Calibration of Gauge Block Comparators", (previously EAL-G21) Aug. 1996
16. G. Bönsch, "Gauge blocks as length standards measured by interferometry or comparison: Length definition, traceability chain and limitations," In Proc. SPIE 3477, pp 199-210 (Intern. Conf. on Optical Metrology of Gauge Blocks, San Diego, Calif., July 1998)
17. G. Bönsch, "Interferometric calibration of an integrating sphere for determination of the roughness correction of gauge blocks," In Proc. SPIE 3477, pp 152-160 (Intern. Conf. on Optical Metrology of Gauge Blocks, San Diego, Calif., July 1998)
18. R. K. Leach, A. Hart, "EUROMET Project 413: Interlaboratory comparison of measurements of the phase correction in the field of gauge block interferometry," Metrologia 37, pp 261-267, 2000
19. J. M. Bennett and L. Mattson:, "Introduction to surface roughness and scattering," Optical Society of America, Second printing 1993