Microfabrication and testing of suspended structures compatible with silicon-on-insulator technology

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 4, 1999, Pages 1589-1593

  Ayon A A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644452378     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590794     Document Type: Article

References (15)

1. J. C. Arnold and H. H. Sawin, J. Appl. Phys. 70, 5314 (1991).
2. S. Tabara, Jpn. J. Appl. Phys., Part 1 35, 2456 (1996).
3. G. S. Hwang and K. P. Giapis, J. Vac. Sci. Technol. B 15, 70 (1997).
4. N. Fujiwara, T. Maniyama, and M. Yoneda, Jpn. J. Appl. Phys., Part 1 34, 2095 (1995).
5. A. A. Ayón, K. Ishihara, R. A. Braff, H. H. Sawin, and M. A. Schmidt, 45th International Symposium of the American Vacuum Society, Baltimore, MD, 2-6 November 1998.
6. Surface Technology Systems USA Inc., Redwood, CA.
7. A. A. Ayón, C. C. Lin, R. Braff, R. Bayt, H. H. Sawin, and M. Schmidt, J. Electrochem. Soc. 146, 339 (1999).
8. A. A. Ayón, C. C. Lin, R. Braff, R. Bayt, H. H. Sawin, and M. Schmidt, 1998 Solid Sate Sensors and Actuator Workshop, Hilton Head, SC, 8-11 June 1998.
9. J. Bhardwaj, H. Ashraf, and A. McQuarrie, Annual Meeting of the Electrochemical Society, Symposium on Microstructures and Microfabricated Systems, Montreal, Quebec, 4-9 May 1997, p. 118.
10. T. Nozawa, T. Kinoshita, T. Nishizuka, A. Narai, T. Inoue, and A. Nakaue, Jpn. J. Appl. Phys., Part 1 34, 2107 (1995).
11. T. Kinoshita, M. Hane, and J. P. McVittie, J. Vac. Sci. Technol. B 14, 560 (1996).
12. K. K. Chi, H. S. Shin, W. J. Yoo, C. O. Jung, Y. B. Koh, and M. Y. Lee, Jpn. J. Appl. Phys., Part 1 35, 2440 (1996).
13. Z. L. Zhang and N. C. MacDonald, J. Micromech. Microeng. 2, 31 (1992).
14. A. A. Ayón, N. Kolias, and N. C. MacDonald, in Proceedings of the 1995 Asia-Pacific Microwave Conference, Taejon, South Korea, 10-13 October 1995, p. 147.
15. A. A. Ayon, K. Ishihara, R. Braff, H. H. Sawin, and M. Schmidt, Fall Meeting of the materials Research Society, Boston, MA, 30 Nov.-4 Dec. 1998.