Angular micropositioner for disk drives

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 454-459

  Horsley, David A ^a   Singh, Angad ^a   Pisano, Albert P ^a   Horowitz, Roberto ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COST EFFECTIVENESS; ELECTRONIC EQUIPMENT MANUFACTURE; ETCHING; MAGNETIC DISK STORAGE; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; SERVOMOTORS; SILICON COMPOUNDS; SILICON WAFERS; SOLDERING; TORQUE;

ANGULAR MICROPOSITIONER; HEXSIL PROCESS; LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); POLYSILICON DEPOSITIONS; ROTARY ELECTROSTATIC MICROACTUATORS;

ACTUATORS;

EID: 0030652701     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)