Interference pattern formation from an array of coherent laser beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2602-2605

  Liu, Y ^a   Barhen, J ^a   Braiman, Y ^a   Zhong, J X ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; COHERENT LIGHT; INTERFEROMETRY; LASER BEAMS; LIGHT INTERFERENCE; LIGHT PROPAGATION; LIGHT SOURCES; NUMERICAL ANALYSIS; PHOTONS; REFRACTIVE INDEX;

COHERENT LASER BEAM; INTERFERENCE PATTERN FORMATION; MULTIPLE BEAM INTERFERENCE; TWO-BEAM INTERFEROMETRIC LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0036883130     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1523396     Document Type: Article

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