Integrated detectors for embedded optical interconnections on electrical boards, modules, and integrated circuits

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 6, 2002, Pages 1427-1434

  Cho, Sang Yeon ^a   Seo, Sang Woo ^a   Brooke, Martin A ^a   Jokerst, Nan M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Embedded photodetector; Metal semiconductor metal; Optical interconnection

Indexed keywords

EMBEDDED SYSTEMS; MASKS; MICROELECTRONIC PROCESSING; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PHOTODETECTORS; PRINTED CIRCUIT BOARDS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES; THIN FILMS;

ELECTRICAL INTERCONNECTION SYSTEMS; ELECTRICAL PULSE; EMBEDDED OPTICAL INTERCONNECTIONS; INTEGRATED DETECTORS; METAL SEMICONDUCTOR METAL PHOTODETECTOR; OPTICAL INTERCONNECTION WAVEGUIDE; SILICON SUBSTRATE;

INTEGRATED OPTOELECTRONICS;

EID: 0036881380     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2002.806724     Document Type: Article

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