Optimization of metal-semiconductor-metal (MSM) photodetector arrays integrated with polyimide waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2918, Issue , 1997, Pages 211-221

  Callender, Claire L ^a   Robitaille, Lucie ^a   Noad, Julian P ^a   Gouin, Francois L ^a   Almeida, Carlos ^a  

^a Industry Canada   (Canada)

Author keywords

Integration; MSM photodetector; Optical interconnection; Optoelectronic; Polyimide; Waveguide

Indexed keywords

BUFFER LAYERS; CONDUCTIVE FILMS; DETECTORS; ELECTRIC LOSSES; ELECTRODES; FABRICATION; GALLIUM ALLOYS; INTEGRATED CIRCUITS; INTEGRATION; LIGHT; LIGHT INTERFERENCE; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL FIBER COUPLING; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL INTERCONNECTS; OPTIMIZATION; OPTOELECTRONIC DEVICES; PHOTODETECTORS; POLYIMIDES; POLYMERS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SILICON COMPOUNDS; SPINNING (FIBERS); THICKNESS MEASUREMENT; TIN; TITANIUM COMPOUNDS; WAVEGUIDES;

BUTT COUPLINGS; DETECTOR FABRICATIONS; INDIUM TIN OXIDES; INPUT SIGNALS; INTERDIGITATED ELECTRODES; MSM DETECTORS; MSM DEVICES; MSM PHOTODETECTOR; MULTIMODE; MULTIMODE WAVEGUIDES; OPTICAL FUNCTIONS; OPTICAL INTERCONNECTION; OPTICAL TAPS; OPTOELECTRONIC; OPTOELECTRONIC INTEGRATED CIRCUITS; PHOTODETECTOR ARRAYS; POLYIMIDE WAVEGUIDES; POWER DIVISIONS; RIDGE WAVEGUIDES; SCHOTTKY; SCHOTTKY ELECTRODES; SEMI-CONDUCTORS; SIGNAL ROUTING;

OPTICAL WAVEGUIDES;

EID: 0000176326     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.265367     Document Type: Conference Paper

References (12)

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