Observation of step-flow growth in femtosecond pulsed laser deposition of Si on Si(100)-2 × 1

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 6, 2002, Pages 2068-2071

  Hegazy, M S ^a   Elsayed Ali, H E ^a  

^a Old Dominion University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM GROWTH; HIGH ENERGY ELECTRON DIFFRACTION; MOLECULAR DYNAMICS; PULSED LASER DEPOSITION;

STEP-FLOW GROWTH;

SILICON;

EID: 0036864245     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1517257     Document Type: Article

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