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Volumn 161, Issue 1, 2002, Pages 96-101
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Moisture barrier properties of plasma enhanced chemical vapor deposited SiCxNy films on polyethylene naphthalate sheets and epoxy molding compound
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Author keywords
Moisture barrier layers; Plasma enhanced chemical vapor deposition; Silicon carbon nitride
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COMPRESSIVE STRESS;
MECHANICAL PERMEABILITY;
MOISTURE CONTROL;
PLASMAS;
SENSORS;
THIN FILMS;
EPOXY MOLDING COMPOUNDS;
COATING TECHNIQUES;
COATING;
CORROSION PREVENTION;
MOISTURE;
MOLD;
PLASMA TREATMENT;
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EID: 0036837180
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00419-X Document Type: Article |
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Times cited : (26)
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References (16)
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