Study on surface acoustic wave characteristics of SiO2/interdigital-transducer/ZnO/diamond structure and fabrication of 2.5 GHz narrow band filter

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 SUPPL. B, 1998, Pages 2918-2922

  Nakahata, Hideaki ^a   Kitabayashi, Hiroyuki ^a   Uemura, Tomoki ^a   Hachigo, Akihiro ^a   Higaki, Kenjiro ^a   Fujii, Satoshi ^a   Seki, Yuichiro ^a   Yoshida, Kentaro ^a   Shikata, Shin Ichi ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

Diamond; Electromechanical coupling coefficient; Narrow band filter; SiO2; Surface acoustic wave; Temperature coefficient of frequency; Velocity; ZnO

Indexed keywords

ACOUSTIC WAVE VELOCITY; DIAMONDS; FABRICATION; QUARTZ; TRANSDUCERS;

ELECTROMECHANICAL COUPLING COEFFICIENT; INTERDIGITAL TRANSDUCER; NARROW BAND FILTER; TEMPERATURE COEFFICIENT OF FREQUENCY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0032068508     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2918     Document Type: Article

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