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Volumn 34, Issue 7, 2002, Pages 569-573
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Design of GaN convex diffractive microlenses
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Author keywords
Diffractive optical elements; GaN; Microlenses; MOEMS; Optical data storage; Optical MEMS
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Indexed keywords
DIFFRACTIVE OPTICS;
GALLIUM NITRIDE;
MASKS;
MICROELECTROMECHANICAL DEVICES;
OPTICAL DATA STORAGE;
OPTICAL DESIGN;
OPTICAL MATERIALS;
DIFFRACTIVE MICROLENSES;
MICROLENSES;
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EID: 0036783838
PISSN: 00303992
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-3992(02)00073-7 Document Type: Article |
Times cited : (6)
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References (17)
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