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Volumn 34, Issue 7, 2002, Pages 569-573

Design of GaN convex diffractive microlenses

Author keywords

Diffractive optical elements; GaN; Microlenses; MOEMS; Optical data storage; Optical MEMS

Indexed keywords

DIFFRACTIVE OPTICS; GALLIUM NITRIDE; MASKS; MICROELECTROMECHANICAL DEVICES; OPTICAL DATA STORAGE; OPTICAL DESIGN; OPTICAL MATERIALS;

EID: 0036783838     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-3992(02)00073-7     Document Type: Article
Times cited : (6)

References (17)
  • 1
    • 0001140618 scopus 로고    scopus 로고
    • Transferring resist microlenses into silicon by reactive ion etching
    • (1996) Opt Eng , vol.35 , Issue.10 , pp. 2979-2982
    • Eisner, M.1    Schwider, J.2
  • 2
    • 0141783230 scopus 로고    scopus 로고
    • Technique monolithic fabrication of silicon microlenses with selectable rim angles
    • (1997) Opt Eng , vol.36 , Issue.4 , pp. 1094-1098
    • Erdmann, L.1    Efferenn, D.2
  • 5
    • 0000708821 scopus 로고
    • Micro-opto-electro-mechanical systems
    • (1994) Opt Eng , vol.33 , Issue.11 , pp. 3505-3517
    • Motamedi, M.E.1
  • 11
    • 0011046444 scopus 로고    scopus 로고
    • Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication
    • (1998) Appl Opt , vol.37 , Issue.32 , pp. 7568-7576
    • Wang, M.R.1    Su, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.