Fabrication of GaN micro-lens

LEOS Summer Topical Meeting

Volumn , Issue , 1997, Pages 54-55

  Kim, Taek ^a   Khim, Jinseok ^a   Chae, Soohee ^a   Kim, Taeil ^a   Kim, Hyeon Soo ^a   Lee, Young Jun ^a   Yeom, Geun Young ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CAVITY RESONATORS; DRY ETCHING; LIGHT EMITTING DIODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MODULATORS; NITRIDES; PHOTODETECTORS; REACTIVE ION ETCHING; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR LASERS;

INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING (ICP RIE); MICROLENS; VERTICAL CAVITY SURFACE EMITTING LASER DIODES (VCSEL);

ELECTRON LENSES;

EID: 0030650927     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)