Micromachined silicon microvalve

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 95-98

  Ohnstein, T ^a   Fukiura, T ^a   Ridley, J ^a   Bonne, U ^a  

^a HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS--CONTROL; MICROELECTRONICS; VALVES AND VALVE GEAR--FABRICATION;

ELECTROSTATICALLY ACTUATED MICROVALVE; SILICON MICROMACHINING; SILICON MICROVALVE;

ELECTROMECHANICAL DEVICES;

EID: 0025675278     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)