Smallest dead volume microvalves for integrated chemical analyzing systems

Transducers '91

Volumn , Issue , 1991, Pages 1052-1055

  Shoji, Shuichi ^a   Van der Schoot, Bart ^a   de Rooij, Nico ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CHEMICAL ANALYSIS - EQUIPMENT; PIEZOELECTRIC DEVICES; VALVES AND VALVE GEAR;

NORMALLY CLOSED MICROVALVE; NORMALLY OPEN MICROVALVE; PIEZOACTUATOR; SMALL DEAD VOLUME MICROVALVE; THREE-WAY MICROVALVE;

FLUIDIC DEVICES;

EID: 0026374786     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)