Silicon microvalve with integrated flow sensor

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 313-316

  Franz, Jochen ^a   Baumann, Helmut ^a   Trah, Hans Peter ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; FLOW CONTROL; FLOW OF FLUIDS; HYDRAULICS; MICROMACHINING; PRESSURE DROP; SILICON WAFERS; THERMODYNAMICS;

BIMORP MEMBRANE ACTUATOR; CALORIMETRIC MASS FLOW; FLOW SENSORS; SILICON MICROVALVE;

VALVES (MECHANICAL);

EID: 0029488140     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)