Prototype micro-valve actuator

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 40-41

  Busch, John D ^a   Johnson, A David ^a  

^a TiNi Alloy Co Oakland CA USA ^*

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS--DESIGN; MATERIALS WITH MEMORY--THIN FILMS; MEMBRANES--THIN FILMS;

ACTUATION; MICRO-VALVE ACTUATOR; SHAPE-MEMORY ALLOY; THIN FILM MEMBRANE;

ELECTROMECHANICAL DEVICES;

EID: 0025669749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)