Local degradation of magnetic properties in magnetic thin films irradiated by Ga+ focused-ion-beams

IEEE Transactions on Magnetics

Volumn 38, Issue 5 I, 2002, Pages 2237-2239

  Park, Chang Min ^a   Bain, James A ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

FeCoN; FIB irradiation; Ga implantation; Kerr microscopy; M properties; NiFe

Indexed keywords

COERCIVE FORCE; DEGRADATION; GALLIUM; ION BEAMS; ION BOMBARDMENT; MAGNETIC MOMENTS; MAGNETIC PROPERTIES; MAGNETIC RECORDING; MICROSCOPIC EXAMINATION; SURFACE PHENOMENA; TRIMMING;

KERR MICROSCOPY;

MAGNETIC THIN FILMS;

EID: 0036762049     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.802681     Document Type: Article

References (15)

1. C. Tsang, "Design and performance considerations in high areal density longitudinal recording," J. Appl. Phys., vol. 69, p. 5393, 1991.
2. K.G. Ashar, Magnetic Disk Drive Technology. New York: IEEE Press, 1997.
3. T.T. Lam et al., "Recording performance of submicron track width thin film heads," J. Appl. Phys., vol. 79, p. 5645, 1996.
4. G.L. Gorman et al., "Recording studies of sub-micron write heads by focused ion beam trimming," IEEE Trans. Magn., vol. 33, p. 2824, Sept. 1997.
5. Y. Guo et al., "Low fringe-field and narrow-track MR heads," IEEE Trans. Magn., vol. 33, p. 2827, Sept. 1997.
6. T. Koshikawa et al., "A new write head trimmed at wafer level by focused ion beam," IEEE Trans. Magn., vol. 34, p. 1471, July 1998.
7. C. Chappert et al., "Planar patterned magnetic media obtained by ion irradiation," Science, vol. 280, p. 1919, 1998.
8. C. Vieu et al., "High resolution magnetic patterning using focused ion beam irradiation," Microelectron. Eng., vol. 53, p. 191, 2000.
9. B.D. Terris et al., "Ion-beam patterning of magnetic films using stencil masks," Appl. Phys. Lett., vol. 75, p. 403, 1999.
10. + ion irradiation," Appl. Phys. Lett., vol. 78, p. 1589, 2001.
11. B.W. Corb et al., "Chemical bonding, magnetic moments, and local symmetry in transition-metal-metalloid alloy," Phys. Rev. B, vol. 27, p. 636, 1983.
12. B.W. Corb, "Magnetic moments and coordination symmetry in bcc Fe-M Alloys," Phys. Rev. B, vol. 31, p. 2521, 1985.
13. J. Crangle, Electronic Structure and Alloy Chemistry of the Transision Elements, P.A. Beck, Ed. New York: Interscience, 1963, p. 51.
14. V.J. Moore and P.D. Prewett, "Effects of Ga ion irradiation from a liquid metal ion source," Vacuum, vol. 34, p. 189, 1984.
15. N.I. Kato et al., "Side-wall damage in a transmission electron microscopy specimen of crystalline Si prepared by focused ion beam etching," J. Vac. Sci. Technol., vol. 17, p. 1201, 1999.