Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragm

Sensors and Actuators, A: Physical

Volumn 63, Issue 3, 1997, Pages 209-215

  Zou, Quanbo ^a   Li, Zhijian ^a   Liu, Litian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Condenser microphones; Corrugated diaphragms; Single chip fabrication

Indexed keywords

COMPUTER SIMULATION; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; INTEGRATED CIRCUIT MANUFACTURE; MICROPHONES; OPTIMIZATION; SEMICONDUCTOR DEVICE STRUCTURES; SENSITIVITY ANALYSIS;

ACOUSTIC PERFORMANCE; CONDENSER MICROPHONES; CORRUGATED DIAPHRAGMS; MECHANICAL PERFORMANCE; SINGLE CHIP FABRICATION;

SILICON SENSORS;

EID: 0031374920     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80507-9     Document Type: Article

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