The first low voltage, low noise differential silicon microphone, technology development and measurement results

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 42-45

  Rombach, P ^a   Mullenborn M ^a   Klein, U ^a   Rasmussen, K ^a  

^a Microtronic A/S   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; DIFFERENTIAL AMPLIFIERS; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; HARMONIC DISTORTION; SEMICONDUCTING SILICON; SENSITIVITY ANALYSIS; SIGNAL TO NOISE RATIO;

CONDENSER MICROPHONES; DIFFERENTIAL SILICON MICROPHONES];

MICROPHONES;

EID: 0035001644     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906474     Document Type: Article

References (0)