Electret membranes and backelectrodes for application in micromechanical transducers

Journal of Electrostatics

Volumn 48, Issue 3-4, 2000, Pages 179-191

  Amjadi, Houman ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Charge storage; Electret membrane; Elevated humidity; Micromechanical transducer; Microphone; Sensors; Silicon dioxide

Indexed keywords

ATMOSPHERIC HUMIDITY; DEPOSITION; ELECTRETS; ELECTRIC CHARGE; ELECTRODES; FILM GROWTH; MEMBRANES; MICROPHONES; POTASSIUM COMPOUNDS; SENSORS; SILICA; SILICON NITRIDE;

MICROMECHANICAL TRANSDUCERS; POTASSIUM HYDROXIDE;

TRANSDUCERS;

EID: 0033882853     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3886(99)00064-9     Document Type: Article

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