Evolution of Ge/Si(0 0 1) islands upon oxidation and water etching

Thin Solid Films

Volumn 415, Issue 1-2, 2002, Pages 296-302

  Liu, Chuan Pu ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Coherent island; Domes; Etching; Ge Si; Pyramids

Indexed keywords

ASPECT RATIO; ETCHING; OXIDATION; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON; SURFACE REACTIONS;

COHERENT ISLANDS;

THIN FILMS;

EID: 0036672105     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00539-4     Document Type: Article

References (14)