Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing

Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999

Volumn , Issue , 1999, Pages 359-368

  Britton, C L ^a,b   Warmack, R J ^a,b   Smith, S F ^a,b   Oden, P I ^a,b   Jones, R L ^b   Thundat, T ^a   Brown, G M ^a   Bryan, W L ^a   Depriest, J C ^a   Ericson, M N ^a   Emery, M S ^a   Moore, M R ^a   Turner, G W ^a   Wintenberg, A L ^a,b   Threatt, T D ^b   Hu, Z ^b   Clonts, L G ^a   Rochelle, J M ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC BATTERIES; GOLD COATINGS; MICROMACHINING; SURFACE MICROMACHINING; VLSI CIRCUITS;

CANTILEVER ARRAYS; CHEMICAL AND BIOLOGICAL SENSING; COMMON ENVIRONMENT; HIGH SENSITIVITY; HYDROGEN-SENSING; MICRO-CANTILEVER ARRAYS; OAK RIDGE NATIONAL LABORATORIES; SURFACE MICROMACHINED MEMS;

CODE DIVISION MULTIPLE ACCESS;

EID: 85031526623     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARVLSI.1999.756060     Document Type: Conference Paper

References (17)

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