cBN films grown by hot filament assisted microwave electron cyclotron resonance CVD

Vacuum

Volumn 66, Issue 1, 2002, Pages 65-70

  Zhang, S J ^a   Chen, G H ^a   Deng, J X ^a   Zhang, D X ^a   Ren, W ^a   Wang, B ^a   Yan, H ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

cBN films; CVD; ECR; Hot filament

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; SUBSTRATES; THERMOANALYSIS;

HOT FILAMENTS;

THIN FILMS;

EID: 0036606790     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00426-2     Document Type: Article

References (32)